Carbon Tetrafluoride (CF4) High Purity Gas
Basic Information
|
CAS |
75-73-0 |
|
EC |
200-896-5 |
|
UN |
1982 |
What is this material ?
Carbon tetrafluoride is a colorless, odorless gas at standard temperature and pressure. It is highly chemically inert due to the strong carbon-fluorine bonds. This makes it non-reactive with most common substances under normal conditions. CF4 is a potent greenhouse gas, contributing to global warming.
Where to use this material ?
1. Semiconductor Manufacturing: CF4 is extensively used in the electronics industry for plasma etching and chemical vapor deposition (CVD) processes. It helps in precision etching of silicon wafers and other materials used in semiconductor devices. Its chemical inertness is crucial in preventing unwanted reactions during these processes.
2. Dielectric Gas: CF4 is employed as a dielectric gas in high-voltage electrical equipment and gas-insulated switchgear (GIS). Its high dielectric strength and excellent electrical insulating properties make it suitable for use in these applications.
3. Refrigeration: CF4 has been used as a refrigerant in some low-temperature applications, although its use has decreased due to environmental concerns over its high global warming potential.
4. Tracer Gas: It can be used as a tracer gas in leak detection processes, especially for identifying leaks in high-vacuum systems and industrial equipment.
5. Calibration Gas: CF4 is used as a calibration gas in gas analyzers and gas detectors due to its known and stable properties.
6. Research and Development: It is used in laboratory research and development for various purposes, including material science, chemistry, and physics experiments.
Note that specific applications and regulations for the use of this material/product may vary by country, industry and purpose. Always follow safety guidelines and consult an expert before using this material/product in any application.
